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IDFBX2:5702Post Date2019-12-18
BackgroundKelvin probes provide non-contact measurements of variations of surface potential. This tool can be used to map either of the two components contributing to surface potentials one due to work function and another due to trapped charge. Charge distribution on the wall acquired during manufacturing or in routine operation, can impact the function and behavior of the fluid in the channel. For example, it has been linked to cell adhesion and clotting of red b…
Patent
Publication NumberUS 7116115Filing StatusIssued PatentAvailabilityUnknownFiling Date2004-05-24Publication Date2006-10-03
A micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate are provided. The probe apparatus includes an integrated scanning tip and a dither actuation mechanism. The actuation is achieved using a bent-beam electrothermal actuator, and the probe tip is insulated from the actuator with a wide isolation gap. The device is fabricated by a modified micro electro-discharge machining process wh…
Patent
Publication NumberUS 5289010Filing StatusIssued PatentAvailabilityUnknownFiling Date1992-12-08Publication Date1994-02-22
Plasma source ion implantation is carried out within an evacuated chamber having a target, such as a semiconductor wafer, supported on a target stage, with pulses of high voltage applied to the target periodically to implant ions from a plasma into the target. The ions in the plasma are purified after formation of the plasma by passing the plasma through an ion cyclotron resonance system composed of excitation electrodes and ion collector electrodes surrounding an ion purification region, wit…
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Patents: 2
Opportunities: 1

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